Vacuum pump manufacturer analysis - how to optimize the vacuum pressure control system

vacuum pump manufacturer to analyze how to optimize the vacuum pressure control system. Vacuum pump manufacturer to analysis how to optimize the vacuum pressure control system. Chip etching process is working in a controlled vacuum environment. Reaction cavity is the function of removing unnecessary needed to keep the process parameters in vacuum steam, air, and additional reaction material. For the plasma reaction can create a vacuum environment. In order to reduce the cost of etching machine vacuum pressure control system, realize the high vacuum equipment for cleaning, simplify and miniaturization, at the same time in order to improve the vacuum system of vacuum rate and ultimate vacuum system lumen body, vacuum pump, connecting pipeline and valve selection is very important.

in order to ensure the etching process required for the stable operation of the etching machine pressure, pump speed vacuum system is the requirement of less than not components. Introduced the vacuum reaction chamber, vacuum pump manufacturer, vacuum valve, vacuum gauge and vacuum detection switch, vacuum gauge and vacuum switch and connection pipe.

vacuum pump manufacturer to analysis how to optimize the vacuum pressure control system. From the following five aspects:

( 1) The reaction cavity

reaction cavity are the basic components of the vacuum system. Different etching reaction chamber with different shapes and sizes, but all belong to the container under negative pressure. In order to increase the chip capacity, reaction chamber adopts the design of multi-station vacuum pump speed to meet the requirements. In the design of transfer, it is difficult to guarantee the consistency of multi-station chip. Vacuum pump pumping rate must be increased. Molecular pump is the best choice. According to the needs of different process, the reaction chamber pressure in 10 - general work 3 - 10 - Between the two. To ensure that the vacuum reaction chamber and pressure, to ensure that, under stable vacuum reaction chamber of the work has been the research topic of vacuum pump manufacturer.

( 2) Vacuum pump selection

vacuum pump is the key equipment for vacuum. So far, there has been no one can work from atmospheric pressure to close to super vacuum pump. Must use a combination of two or more pump and spiral dry pump belongs to the type of positive displacement pump. The working cycle can be divided into suction, compression and discharge process. The advantages of structure stability, low center of gravity, stable rotation, small vibration, low noise. Molecular pump including traction molecular pump, turbomolecular pump, compound molecular pump, etc. The choice of molecular water pump according to etching reaction cavity pressure and volume.

( 3) Select set valve is used in the vacuum valve is in order to meet the needs of the molecular pump, large diameter size. When the swing gate opening is greater than the reaction chamber pressure, it will decrease. When opening greater than a certain degree, however, the vacuum reaction chamber will due to the limited pumping speed of water pump is restricted, and the pressure of the vacuum will be reduced to cannot continue. Therefore, in order to meet the requirements of pressure in the process of etching, need to open the right choice set valve.

( 4) Vacuum gauge and vacuum test switch

vacuum gauge can monitor the reaction chamber and the pressure of the pipeline. Vacuum gauge installed on the reaction chamber and pipe. When the vacuum degree reaches a certain value, the vacuum valve opened or closed. Vacuum gauge classification method there are two main types: (1) according to the true gauge reading method to classify the scale, the absolute vacuum gauge and relative vacuum gauge; ( 2) Classified according to the principle of measurement of the vacuum gauge, namely direct measurement of vacuum gauge and indirect measurement of vacuum gauge. Thin-film condenser vacuum gauge is a kind of indirect absolute vacuum gauge. Because of its stable performance, good repeatability, response speed, strong resistance to overload ability, firm structure, easy to use and is widely used in industry. For security reasons, vacuum pipe must be equipped with atmospheric vacuum switch. When the pressure value to a atmospheric pressure, vacuum switch will automatically open the exhaust outlet, in order to protect the reaction chamber and vacuum equipment of pipe system.

( 5) Connecting pipe

performance parameters of the vacuum system is the most important is that it can obtain the ultimate vacuum reaction chamber and effective pumping speed. Limiting vacuum of vacuum system refers to the pumping time long enough without additional load, the system can achieve the minimum vacuum pressure.

import vacuum pump manufacturers, said is absolutely no leakage phenomenon for any vacuum system, can be achieved, so you need to provide leak detection mouth in the vacuum tube on the road, to facilitate the vacuum leak detection.

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