Rotary vane vacuum pump used in the microelectronics industry _

rotary vane vacuum pumps are mainly small and medium vacuum pump. Rotary vane vacuum pump has two types of single-stage rotary vane vacuum pumps and two stage vacuum pump. The so-called two-stage rotary vane vacuum pumps are two series of single-stage pump structure. Usually, it made into two stages to achieve higher vacuum degree.

microelectronics need more and more small electronic components and circuits, and the integration of higher requirements. It is closely connected with the application of the vacuum technology, especially VLSI micro processing technology. Geometric structure, ultra-thin layer growth technology and the formation of particle beam injection technology needs to be high quality, clean vacuum environment. Depend on the vacuum technology and equipment. Now, today's VLSI process need to vacuum condition ( Rotary vane vacuum pumps can provide) 。

as a result, in microelectronics technology, imported rotary vane vacuum pump plays a certain role in this respect.

microelectronics technology is a high-tech electronic technology based on a variety of semiconductor devices, integrated circuit as the core. It has small volume, light weight, high reliability, quick work. Microelectronics technology in information age have a huge impact.

microelectronics technology is developed on the basis of the traditional electronic technology. It is called 'microelectronics', as the name suggests, because it is a small, advanced technology, its characteristic is 'micro' four: 1 it the micro electronic signal processing is a solid. It is in motion; 2 the scope of work is solid and even lattice micro area; 3 signal exchange only in very small range; 4 it's volume is very big, can put an electronic functions, and even a subsystem integration on a microchip. Microelectronics technology, in short, is a unique and amazing special technology, can work within the scope of the nearly invisible.

the microelectronics technology and consumer of electronic products market has a far-reaching influence. Low cost, reliable, small and light microelectronics technology emerge in endlessly. Electronic technology products and the microprocessor is no longer the world's major scientific instruments aristocrat, but settled in all kinds of popular products, and enter the homes of ordinary people. For example, electronic toys, games, learning machine and other household electrical appliances. Even the traditional automobile mechanical products have also been infiltrated in microelectronics technology. Use of microelectronics technology, automobile anti-theft security system, taxi metering device such as electronic engine monitoring system has been widely used, and sometimes even used in modern cars. A few dozen to dozens of microprocessors.

rotary vane vacuum pump is mainly introduced in this paper the successful application in the microelectronics industry. Rotary vane vacuum water pump is widely used in metallurgy, machinery, military industry, electronics, chemical industry, light industry, petroleum, pharmaceutical production and scientific research departments and so on. It has been widely used in food vacuum packaging and vacuum forming of plastic industry. Paper transmission of the printing industry, vacuum and vacuum aspiration.

Many of us have heard about water pump and seen some of these units in operation in pool cover drain pump, winter cover pump and pool cover drain pump spaces.
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