Note - semiconductor vacuum pump applications

vacuum semiconductor technology is mainly used for bonding process, such as evaporation, sputtering, plasma chemical vapor deposition, vacuum dry etching, vacuum adsorption, test equipment, vacuum cleaning, etc. Semiconductor manufacturing process easy to produce inflammable, explosive, toxic substances and gases, pose a threat to production and personnel safety. So a few in the semiconductor water pump application security considerations are as follows:

1. Regularly clean vacuum pumps and other accessories, filters and the pipeline, to avoid the over voltage.

in semiconductor applications of vacuum pump, when the medium in the process of extraction of medium by reaction chamber and vacuum water pump, the composition of the medium can be extremely complex. Silicon tetrachloride and oxygen, for example, in the water pump form silica, titanium tetrachloride hydrolysis to form hydrochloric acid. Assumption is oil seal, mechanical pump, the gas material also can react with pump oil. Assume that formed particles, these changes can condensate or corrosive medium, they might block the vacuum pump or pipe system, affect the performance of the vacuum pump, result in pressure rise or overvoltage, and cause even greater risk. Therefore, it is necessary to clear in time, if necessary, set the filter device.

2。 Effectively dilute the concentration of harmful gas

semiconductor is prone to the flammable, explosive and poisonous and harmful gas. Therefore, in the application of semiconductor vacuum pump, when extracting the medium, it is necessary to prevent in the process of vacuum pump and exhaust some uncontrollable reaction. For example, when contact with air or oxygen, SiH4, PH3, AsH3, B2H6 and other substances can cause burning even explode. When the blending ratio of hydrogen in the air reaches a certain level and temperature, can also occur. It all depends on the amount of material and its relationship with environmental pressures and temperatures. Therefore, when semiconductor vacuum pump to extract these medium, before compression, need an inert gas such as nitrogen under the condition of these gases will be diluted to the current safety margin.

3。 Pay attention to the concentration of oxygen

if the concentration of oxygen in the air is too high, also the risk of burning and explosion. In some cases, therefore, should pay attention to the concentration of oxygen, and should use inert gas dilution oxygen, to prevent excessive concentrations. Assuming oil seal mechanical pump may need to use some inert oxygen compatible with vacuum pump oil, and promptly replace oil filter and oil.

4。 To prevent excessive temperature

easier to understand this. In a semiconductor in the application of the vacuum pump, there are a lot of harmful gas. In both dry vacuum pump oil seal mechanical pump, however, if the pump chamber temperature is too high, inflammable, explosive and toxic gases at high temperature is easy to produce risk.

when we use the vacuum pump, we need to pay attention to use the security considerations, conductor and prepare in the later use.

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