Dry type vacuum pump type _ in semiconductor technology

oil type vacuum water pump is the types of vacuum pump is commonly used in the semiconductor industry, is the most important characteristics of high vacuum degree, can satisfy the requirement of the new industry special process, and rotary vane vacuum pumps and reciprocating vacuum pump as the main representative. As time goes on, the progress of the society, their performance in various applications can make people feel satisfied, such as rotary vane vacuum pumps can't pumping steam and non-condensable gas and corrosive gas, etc, therefore, the dry vacuum water pump arises at the historic moment.

in the past ten years, there are several different types of dry vacuum pump was designed and produced, they have significant differences in the mechanical structure design. Because of these differences, we can summarize the dry vacuum water pump for the following several types: round lobes type, the claw type, combined type ( Roots + feet) The screw type. Today, these types are widely used by different manufacturers. Among them, the round lobes type, the claw type and combined type ( Roots + feet) Is called the multi-stage pump.

because their way of working is roughly same, all is the use of multi-stage vacuum chamber for repeated compression to produce vacuum gas. In the process of repeated compression, the temperature and pressure of the gas also produced more complex change, thus easy to cause the change of the gas physical properties. The screw was known as the single pump, because it only to produce vacuum by a vacuum chamber. Based on its way from the gas compression is different, and it can be divided into internal compression screw pump and external compression screw pump.

now a lot of dry vacuum pump application in the semiconductor industry, is used to replace the oil type vacuum pump. Not only satisfy the vacuum degree necessary for the production, also can satisfy the requirements for the special process in the industry.