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_ dry screw vacuum pump characteristic and advantage

by:J&T     2020-07-12
1, exhaust path shorter, less reactant sedimentary

dry screw vacuum pump compared with other forms of vacuum pump, because of the gas in the pump transmission path the shortest, the most is not easy to produce the reactant sedimentary phenomena.

2, linear sealing, the pump performance better

rotor linear sealing, sealing, the rotor rotor to larger meshing clearance faster extraction effect. Gap is bigger, pump are due to less jammed by process gas deposits, the rotor is also less need to change due to abrasion.

3, simple structure, low failure rate, maintenance easy because of the need to use

screw vacuum pump spray close to achieve sealing effect, each other a pair of rotor structure, unlike other forms of the design of the vacuum pump needs a middle clapboard, reduce the risk of rotor and clapboard deposit card dead. And because of its simple structure, maintenance also relatively easy to disassemble, so can shorten the maintenance schedule, reduce maintenance cost.

4, microcomputer operation, remote monitoring, protection comprehensive

microcomputer control device provide vacuum pump is the most simple mode of operation and can show the running status, the pump complete convenient user adjust pump application, before the water pump problem for preventive maintenance. Remote monitoring system can provide users convenient monitoring tools, the user does not need to the scene to query the running status of pump.

4, performance advantage

( 1) Special cooling liquid cooling, to avoid the cooling water may cause corrosion to the hull.

( 2) Mobile operation interface, convenient operation; Display and the actual work of vacuum pump and can be selected to both languages, according to the real close to the customer.

( 3) Catch the power connector, safe and convenient.

( 4) Nitrogen gas heater, make the vacuum pump is more suitable for CVD, PECVD semiconductor processes such as technique.

( 5) Control signals and communication signal interface, remote monitoring on vacuum pump.


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