Deal with particle method, the dry vacuum pump applications

in the process of the application of dry vacuum water pump, especially in some semiconductor applications, it is hard to avoid gas composition containing particulate medium. Although the dry vacuum pump such as screw vacuum water pump have certain tolerance of granules medium, but still needs to take measures to reduce the produce of the particulate matter quality and mix.

in general, there are three kinds of particles in the dry vacuum pump, one of the most simple is mixed in the process of pumping particles, the second is inside the pump pressure caused by the gas-solid phase change of the products, another kind is the product of the reaction gases inside the water pump.

in view of these situations, in order to reduce the particulate matter in the vacuum pump with, in addition to the necessary pump before the filtration and separation, the following measures can be taken to prevent the active particles in the pump with:

the first it is appropriately raise the temperature of pump, to avoid the gas-solid phase transition. Material sublimation and the role of pressure and temperature in the solidification process owing to the different material. To regulate the temperature of the dry vacuum pump can avoid the gas-solid phase transition process. Aluminium trichloride, for example, will be produced in the process of aluminum etching. When the temperature higher than 80 ℃, the aluminium trichloride can evaporate without deposit.

the second is to reduce participate in chemical reaction gas concentration. Per unit time the number of reaction product gas index related to the concentration of the reaction gas, so the inert gas in the process of production and reduce the concentration of the reaction gas is one of the effective methods to reduce particles produced in pump. Usually, in the dry vacuum pump needed before compressed gas into the inert gas. At the same time, in the process of some process, the inert gas are introduced to reduce the concentration of the reactive gases can also help to prevent explosion accidents.

the third is to increase suction air velocity in the channel. For the inevitable particles appear in the vacuum pump, in order to prevent the deposition and discharge as soon as possible, must make the air velocity is greater than the critical velocity of particle deposition, to ensure the pneumatic transport of particles. At this point, it is necessary to filling the right amount of gas in the pump as soon as possible, so that the gas flow rate is greater than the critical particle deposition rate. For filling the gas volume, however, it is necessary to consider whether it will affect the limit of the vacuum pump pressure, the need to determine the optimal amount of filling the practice.

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