Used in semiconductor factory introduction - dry vacuum pump type

since dry vacuum pump were designed, mechanical agencies have obvious differences. Of course this is caused by different manufacturers and brands. Dry vacuum pump can be divided into round lobes, claw type vacuum pump, vacuum pump combination ( Roots + feet) Vacuum pump, screw vacuum pump. 3 we called multistage pump, in front of this way of working. Are using multistage vacuum chamber for repeated compression to produce vacuum gas. In the process of repeated compression, the temperature and pressure of the gas also produced more complex change, thus easy to cause the change of the gas physical properties. Screw vacuum pump is single stage pump. Only the vacuum generated by a vacuum chamber song. Based on its way from the gas compression is different, and it can be divided into internal compression screw pump and external compression screw water pump. Here came a detailed understanding.

round lobes

double circular lobes type vacuum pump design and at present the most popular and widely used of roots pump are very similar. In fact, some of the most early dry pump design thought is the superposition of roots pump. The multistage design makes the gas channel is very complex, and each level requires larger flow of nitrogen dilution and isolation effect. At the same time, in order to achieve a good vacuum degree, have very strict request for clearance at all levels. Of course, this design due to the increased internal compression ratio and its power consumption is relatively low.

3 leaf lobes round type vacuum pump

3 leaf lobes round type design and the principle of double circular lobes type design are exactly the same, just in the heart of the rotating ring gas can be divided into three parts rather than the double circle is divided into two lobes type. The advantages and disadvantages of these two kinds of design with the same. In order to further reduce the power consumption, some manufacturer in transmission part selects two dc motors, but it can also lead to torque decreases, and restart the ability - Decline. As with double circular lobes type design, 3 leaf round each level of the design need larger flow of nitrogen to dilute and isolation effect. Using combined (

Roots + feet) Vacuum pump

combined ( Roots + feet) Design with roots to increase extraction efficiency under low pressure, with her paw to increase extraction efficiency under high pressure. Its basic principle and the gas path round lobes type design is exactly the same with described above. And some factory will be the last level to star design, so can be divided into five copies of gas in the rotating ring, like three circles lobes type design can be divided into three parts. Similarly, in a lot of technology, the modular design of each level need larger flow of nitrogen to dilute and isolation effect.

type external compression screw vacuum pump

in external compression type screw design, using a pair of isometric screw. It makes to minimize the internal compression, while making gas path the shortest is also the most simple. So, the time duration of the gas in the pump body is the shortest. Although this design due to reduced internal compression ratio and makes its power consumption is relatively high, but in many complicated semiconductor process showed high stability. This single stage design makes the demand for nitrogen dosage is very small and simple, which makes it have good compatibility in different process. In a lot of cleaning process can even without nitrogen.

type internal compression screw vacuum pump

in addition to using a pair of non-isometric screw, internal compression and external compression screw design model is very similar to the basic principle of screw design. Volume between screw and decreases makes its internal compression. This design due to the internal compression and makes its power consumption is reduced to the same level of the multistage pump. But in a lot of technology, the internal compression as well as multi-stage pump, easy to cause the physical and chemical change of gas in the pump body and produce curing or liquefaction.

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