Understand the vacuum automatic control common nouns _
the vacuum automatic control of common vocabulary term has a lot of, these are small below summary for everybody. Hope to be able to bring you help.
1, the controlled object
required to control the vacuum device or the production process, called a controlled object. For example, vacuum valve, vacuum pump, vacuum coating machine, vacuum heat treatment furnace, etc.
2, measuring device measuring device controlled quantity changes. For example, vacuum gauge, thermometer, film thickness measuring instrument, etc.
3, adjusting device ( Regulator)it control the measuring devices are measured by child and vacuum technology needed to maintain, in comparison with the given value of deviation, and according to the designed arithmetic operation rule, signal, control actuator motion, in order to eliminate the deviation of control volume with a given value. Such as analog PID ( Proportional, integral, differential) Controller, digital PID regulator ( The single chip microcomputer and computer) And so on. In the vacuum degree of vacuum control, it is usually with vacuum gauge measuring device and vacuum valve actuator together, constitute a pressure controller.
4, actuator it receives signal from the control device, adjust action, to eliminate the value of a control volume with a given partial
. Such as to adjust the control valve of vacuum degree in vacuum chamber and heating temperature adjustment dynamometer are such institutions. 5,
means being controlled by control quantity within the object for the control parameters. Such as pressure, temperature, flow rate, film thickness, etc.
6, measured valuesmeasuring device is measured by the amount of control the actual value.
7, a given value by control volume requires constant or a predetermined rule change specified value.
8, deviation of measured value with the given value.
9, disturbance interference which is made by control volume change factors. Disturbance is divided into two kinds: one kind of control system in each link of the disturbance, known as the interference; Another kind of outside interference on the system for the control system, known as external disturbance.
10, feedback the output signal back to the input side, to strengthen or weaken the effect of the input signal called feedback. All the input signal enhancement is called positive feedback; On the other hand, it is called a negative feedback. In the automatic control system with negative feedback.
11, regulating process refers to the control system by adding the signal, Given value or disturbance) , the original state of equilibrium is destroyed, due to the effect of adjustment of the automatic control device, the controlled quantity to restore balance to the original state, or the process of transition to a new equilibrium state. 12
means, bit type adjustment is to control the amount of deviation from the given value, the controller makes the adjustment of the actuators are fully open or close. If have, the lower pressure on a given vacuum relay pressure regulation. 13, proportional control
controller output signal proportional to the size of deviation, make the actuator position corresponding to the size of the deviation, it can reduce the deviation, but can't completely eliminate the deviation. Commonly used P ( 比例) Said. 14, PI adjustment
controller output signal proportional to the deviation not only, and the deviation is proportional to the integral of time, make the actuator adjusted according to the deviation of proportion, integral, is theoretically the regulation of deviation is zero. Commonly used PI ( Propor- tional Intergral) Said.
15, pid adjustment
is the proportion, integral and differential three comprehensive adjustments of the adjustment rules combined controller output signal not only with the size of a deviation and deviation is the length of time, also associated with the rate of deviation change. Commonly used PID ( 比例积分都衍生品) Said. 16, scale zoom
multiple Kp increase Kp, can make the static deviation smaller, but the stability of the system variation; On the other hand, can improve the stability of the system, but the static deviation. Usually use the proportion of the regulator magnification, the reciprocal of Kp 8, said called the proportion.
T said 17, integral time integral adjustment speed and strength of the adjustable parameters. In analog integrated controller, its value is equal to the regulator integral circuit time constant. 18, differential time
Td said regulator in the differential regulation strength adjustable parameters. In the simulation of differential regulator, and its numerical differential circuit time constant is equal to the regulator. 19, stability,
refers to the control system under the effect of disturbance, the transition process can be finished and the performance of the balance. In the
after the disturbance elimination, the system can restore the original state of equilibrium is stable. 20,
refers to the system is in steady state precision balance, the deviation of control volume with a given value ( The static deviation) 。
21, dynamic precision refers to the system changes with time under the action of a given signal of the precision. In a fixed value system, dynamic accuracy is the biggest transition process dynamic deviation.
22, automatic control system of automatic control device and control object of the automatic control system, it can make the controlled object according to the predetermined rule action, automatic vacuum process. Such as coating machine computer control system, etc.
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