Semiconductor vacuum pump in use should pay attention to what -

semiconductor technology is mainly used in vacuum evaporation, sputtering, PECVD, vacuum dry etching technique, vacuum adsorption, test equipment, such as vacuum cleaning bonding process. Semiconductor manufacturing process easy to produce inflammable, explosive, toxic substances and gases, pose a threat to production and personnel safety. So a few safety precautions in the semiconductor pump application are as follows:

1. Regularly clean vacuum pumps and other accessories, filters and the pipeline, to avoid the over voltage

in semiconductor applications of vacuum pump, when the medium in the process of extraction of medium by reaction chamber and vacuum water pump, the composition of the medium can be extremely complex. SiH4 and O2 in the pump inlet, for instance, silicon dioxide, hydrogen chloride and titanium tetrachloride hydrolysis formation. Assuming that use oil seal mechanical pump, these gaseous substances may also react with pump oil. Assumes that particles, these changes can condensate or the formation of corrosive medium, may be blocking vacuum pump or pipe system, affect the performance of the vacuum pump, result in higher pressure or overvoltage, and bring more risk. Therefore, it is necessary to clear in time, if necessary, set the filter device.

2。 Effectively dilute the concentration of harmful gases in

semiconductor is prone to the flammable, explosive and poisonous and harmful gases. Therefore, in the application of semiconductor vacuum pump, when extracting the medium, it is necessary to prevent the vacuum pump or some uncontrollable reaction in the process of exhaust. For example, when contact with air or oxygen, SiH4, PH3, AsH3, B2H6 and other substances can cause burning even explode. When the blending ratio of hydrogen in the air reaches a certain temperature and degree, can also occur. It all depends on the amount of material and its relationship with environmental pressures and temperatures. Extraction of the medium, therefore, when the semiconductor vacuum pump before compression to the current condition, the need of inert gas such as nitrogen to dilute the gas to safe range.

3。 Pay attention to the concentration of oxygen

if the concentration of oxygen in the air is too high, combustion and explosion risk can also occur. In some cases, therefore, should pay attention to the concentration of oxygen, and should use inert gas to dilute it, in order to prevent the concentration is too high. Assuming oil seal mechanical pump may need to use some inert oxygen compatible with vacuum pump oil, and promptly replace oil filter and oil.

4。 To prevent excessive temperature

this easier to understand. In a semiconductor in the application of the vacuum pump, there are a lot of harmful gas. In both dry vacuum pump oil seal mechanical pump, however, if the pump cavity temperature is too high, inflammable, explosive and toxic gases at high temperature is easy to cause dangerous.

when we use the vacuum pump, need to pay attention to use the conductor security considerations, and do a good job after use.

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