Semiconductor factory in the vacuum system in that _

it is well known that the semiconductor technology level determines the transistor size. In semiconductor factory or power plant, the vacuum system is applied to the process equipment of vacuum suction cups or suction pen to carry transmission wafer or glass, of important support systems for semiconductor process. This article involves the semiconductor process technology, introduced the vacuum system application in semiconductor processes, before going to the semiconductor process and vacuum system to do some simple introduction.

in the vacuum system, vacuum to atmospheric, represents a particular part of the gas expelled for space or system, its internal pressure is less than the atmospheric pressure of the space, then call this space for vacuum or vacuum, simple, the space below the atmospheric pressure is the pressure in vacuum. In a high-tech process required in high vacuum or ultra high vacuum, there must be enough vacuum technology or equipment.

semiconductor processes for the vacuum degree of vacuum system requirements in general is 700 - ~ 500 MMHG, only to fall within the scope of the rough vacuum, and process equipment vacuum degree requirements depending on the scope of its application, and fell on the vacuum degree and the scope of ultra-high vacuum degree or above.

a combination of different types of vacuum pump system, vacuum degree is different also, about the type of the vacuum system, sort out a few broad categories.

there are three types of vacuum systems:

1. Low vacuum system

2. In the vacuum system

1) mainly consists of roots pump pump series mechanical pump, constitute the system;

(2) composed of oil pump as the main pump series mechanical pump and system;

(3) by the roots pump series ronaldinho, pump, series of mechanical pump and the system again.

3。 High vacuum system

1) mainly by the diffusion pump pump series roots pump, then series mechanical pump, constitute the system;

(2) composed of mainly diffusion pump pump series mechanical pump and vacuum system;

(3) by a series of oil diffusion pump as the main pump booster pump, series of mechanical pump and the vacuum system.

the content above, in the process of semiconductor manufacturing, is to choose the best way to application of high vacuum system, in the high vacuum system can be a different vacuum equipment together.

in fact, a simple vacuum system can only obtain coarse vacuum, and expect to get high vacuum, typically in series in the vacuum system of high vacuum pump, such as roots pump screw pump and the high vacuum pump. When the series connection of high vacuum pump, usually combined with inlet and outlet valve in high vacuum pump, high vacuum pumps keep vacuum alone. If is a series of high vacuum pump oil diffusion pump, in order to prevent backflow into the container is to a large amount of oil vapor, usually add the entrance of the diffusion water pump oil trap Water baffle. The request can also add a line filter, vacuum gauge head relay, connect the vacuum pump purge valve entrance, radiator such as vacuum hose, it formed a more complete high vacuum system.

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