Application of vacuum pumps and precautions _ semiconductor industry

semiconductor technology is main used in vacuum evaporation, sputtering, PECVD, technique of vacuum dry etching, vacuum adsorption, test equipment, vacuum cleaners, and so on bonding process, easy to produce in the process of semiconductor manufacturing gas inflammable and explosive and toxic substances, can pose a threat to the safety of production and, therefore, semiconductor pump applications need to be aware of several security issues:

1, regular cleaning, vacuum pumps and other accessories, filters, pipes, avoid overpressure:

semiconductor vacuum pump applications, in the process of extraction medium after reaction chamber and vacuum pump, its composition could be extremely complicated, such as SiH4 and O2 in the pump form SiO2, TiCl4 hydrolysis can form HCl; Assumption is mechanical pump oil seal type, these gases against material could happen with pump oil. These changes hypothesis formation particles and condensable or corrosive medium, can jam or piping system, vacuum water pump affect the vacuum pump performance, pressure rise or overpressure, the risk of a point to mention is also bigger. So I need timely cleaning, and set the filtering equipment when necessary.

2, semiconductor pump effectively dilute the concentration of harmful gases:

semiconductor are prone to the front of flammable and explosive, toxic and harmful gases. When semiconductor vacuum pump application in extracting the medium so we must prevent them from within the vacuum pump or some uncontrollable reaction in the process of exhaust. Such as SiH4, PH3, AsH3, B2H6 substances, such as when I was in contact with air or oxygen, can cause burning even explosion; Hydrogen gas in the air mixture ratio reached a certain degree and temperature can also occur when burning. It all depends on the quantity of the material and the relationship between pressure and temperature to the environment. Therefore semiconductor vacuum pump in the extraction of these media, need to use inert gas such as nitrogen, before compression to the gas dilution to at that time under the condition of safe range.

3, vacuum pump oxygen concentration:

if the oxygen concentration is too high in the air and burning and explosion risk will happen. So should pay attention to some cases of oxygen concentration, using inert gas to dilute, prevent excessive concentrations; Assumption is that oil seal mechanical pump may also need to adopt some inert and oxygen compatible vacuum pump oil, and in a timely manner to replace oil filter and oil.

4, avoid high temperature vacuum pump:

it's easy to understand this, semiconductor in the application of the vacuum pump, the harmful gas is more, the dry vacuum pump and oil seal mechanical pump, pump chamber temperature is too high, flammable and explosive and toxic gas under high temperature will be easy to produce risk. When we are in the use of vacuum pump, need to pay attention to use safety matters needing attention in the conductor, and later when using operation.

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